Abstract
We demonstrate a damascene process for fabricating amorphous silicon (a-Si), single-mode optical channel waveguides and high-Q racetrack resonators. This process is compatible with thermal budget limitations for a-Si phase stability. It offers improved optical transmission and facilitates hydrogen encapsulation for process integration of a-Si waveguide cores. At , the average measured transmission loss coefficient is for the TE mode, comparable with high-quality single crystalline silicon counterparts. The racetrack resonators have mid- to quality factors (Q) and extinction ratios as high as .
© 2009 Optical Society of America
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