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Conference Paper
Applied Industrial Optics: Spectroscopy, Imaging and Metrology
Toronto Canada
July 10-14, 2011
ISBN: 978-1-55752-914-5
Semiconductor Applications (AITuC)

Optical Inspection and Metrology in Semiconductor Manufacturing

Mehdi Vaez-Iravani  »View Author Affiliations


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This presentation is a short account of the nature of the problem of defect detection on wafers, and the increasing role of physics in evolving techniques to address the problem.

© 2011 OSA

OCIS Codes
(000.0000) General : General

M. Vaez-Iravani, "Optical Inspection and Metrology in Semiconductor Manufacturing," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper AITuC1.

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