Pulsed lasers are used for sub micron scale fabrication. We employ adaptive optics for correction of focal depth induced aberrations and beam shaping. Adaptive multispot schemes are used for rapid parallel fabrication.
© 2011 OSA
P. S. Salter, A. Jesacher, H. Al-Wakeel, and M. Booth, "Laser microfabrication using adaptive optics: parallelization and aberration correction," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper AMC5.