Typically, MEMS Fabry Perot devices use electrostatic actuation to control mirror spacing and snap in is an issue. A thermally actuated device has been modeled in COMSOL that lifts the mirror through thermal expansion.
© 2011 OSA
A. Rivas, J. Kerekes, and A. Raisanen, "Tunable Single Pixel MEMS Fabry-Perot Interferometer," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWA15.
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