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Conference Paper
Adaptive Optics: Methods, Analysis and Applications
Toronto Canada
July 10-14, 2011
ISBN: 978-1-55752-914-5
Joint FTS/HISE/AO/COSI Poster Session (JWA)

Tunable Single Pixel MEMS Fabry-Perot Interferometer

Annette Rivas, John Kerekes, and Alan Raisanen  »View Author Affiliations


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Typically, MEMS Fabry Perot devices use electrostatic actuation to control mirror spacing and snap in is an issue. A thermally actuated device has been modeled in COMSOL that lifts the mirror through thermal expansion.

© 2011 OSA

OCIS Codes
(230.4685) Optical devices : Optical microelectromechanical devices
(280.4788) Remote sensing and sensors : Optical sensing and sensors

A. Rivas, J. Kerekes, and A. Raisanen, "Tunable Single Pixel MEMS Fabry-Perot Interferometer," in Imaging and Applied Optics, OSA Technical Digest (CD) (Optical Society of America, 2011), paper JWA15.

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