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Thermally Controllable Silicon Photonic Crystal Nanobeam Cavity for for Bio-Sensing Applications

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Abstract

We demonstrate a photonic crystal nanobeam cavity optical device that provides heat and interrogates the refractive index. Experimental results show sensitivity of 97nm/RIU, temperature variation of ~100°C, and temperature switching time of a few µs.

© 2015 Optical Society of America

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