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Optica Publishing Group
  • Conference on Lasers and Electro-Optics
  • OSA Technical Digest (Optica Publishing Group, 1995),
  • paper CFF7

Three-dimensional microgratings for free-space optical interconnects and clock-distribution systems

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Abstract

We report what we believe to be the first fabrication of a monolithic free-space optical- interconnect module consisting of multiple three-dimensional micro-gratings and obtained by using surface micromachining. The first-order diffraction patterns are successfully demonstrated. Free-space implementations of micro-optical systems, such as free-space optical interconnects and optical clock-distribution systems, offer advantages over conventional electrical or planar waveguide approaches. Free-space microoptical systems can possibly achieve high- density optical interconnections and routing. Gratings have applications in many optical systems, such as tunable external-cavity lasers, optical interconnects, wavelength-division multiplexed (WDM) systems, optical-beam clock-distribution systems and microspectrometers. However, conventional gratings lie on the surface of the substrate and are not suitable for monolithic integration for a free-space optical system. In order to achieve monolithic integrability, which is needed for integrated optics, we propose a novel three-dimensional micrograting fabricated by surface micromachining. Similar to the three-dimensional micro-Fresnel lens,1 the grating plates are made into a three-dimensional structure that can stand perpendicular to the substrate with the help of micro-machined microhinges and microspring latches.2 Therefore, micromachined microgratings are very attractive for free-space optical interconnect and clock distribution systems.

© 1995 Optical Society of America

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