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Conferences > CLEO > 2003 > CFL > CFL4
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference
  • Technical Digest (Optica Publishing Group, 2003),
  • paper CFL4

Kinoform optics: direct fabrication by F2 laser ablation

Amir H. Nejadmalayeri, Andrew Yick, Jianzhao Li, and Peter R. Herman

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Abstract

A 64 × 64 element kinoform was microfabricated in fused silica by direct ablation with a pulsed 157-nm laser source that circumv ents multi-step lithographic patterning and etching routines. A 4-level design of ~300-nm etch layers is described.

© 2003 Optical Society of America

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