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Conferences > CLEO > 2004 > CThAA > CThAA4
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CThAA4

Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

Z. Moktadir, G. V. Prakash, E. Koukharenko, C. Gollasch, D. M. Bagnall, M. Kraft, E. Hinds, and J. J. Baumberg

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Abstract

We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and t hen gold coated to form a mirror.

© 2004 Optical Society of America

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