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  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper CThP7

As-grown low-loss germanosilicate layers by PECVD

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Abstract

Systematic characterization of low-loss PECVD grown germanosilicate layers is reported. Addition of germane, decreased N-H bond concentration drastically leading to the lowest reported propagation loss values in germanosilicate planar waveguides, eliminating high temperature annealing requirement.

© 2004 Optical Society of America

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