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  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper CMHH2

Femtosecond laser micromachined multiple-orifice twodimensional ejector arrays for picoliter droplet ejection

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Abstract

A femtosecond laser micromachined multi-orifice two-dimensional silicon-nitride membrane array is reported to generate picoliter droplets. This device uses a higher-order resonance ejection mechanism, increases the flow rate per membrane and can eject from various locations on a membrane.

© 2006 Optical Society of America

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