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Conferences > CLEO > 2007 > CMW > CMW5
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CMW5

Low-Loss Al2O3 Waveguides for Active Integrated Optics

K. Wörhoff, J.D.B. Bradley, F. Ay, and M. Pollnau

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Abstract

Reactively co-sputtered amorphous aluminum oxide layers with low loss (0.11 dB/cm at NIR wavelength) have been fabricated. Channel waveguides with steep, smooth side walls have been etched by a dry process.

© 2007 Optical Society of America

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