Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Conferences > CLEO > 2007 > CThJ > CThJ4
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • OSA Technical Digest Series (CD) (Optica Publishing Group, 2007),
  • paper CThJ4

Single and Multi-Scan Femtosecond Laser Writing for Selective Chemical Etching of Glass Micro-Channels

Stephen Ho, Mi Li Ng, Shane M. Eaton, Peter R. Herman, and J. Stewart Aitchison

Not Accessible

Your library or personal account may give you access

Abstract

High aspect-ratio micro-channels were fabricated in fused silica using a highrepetition-rate 522-nm femtosecond laser and selective chemical etching with diluted hydrofluoric acid. Single and multi-scanning writing is compared for controlling cross-sectional profile and wall roughness.

© 2007 Optical Society of America

PDF Article
More Like This
Fabrication of Micro-channels in Optical Fibers Using Femtosecond Laser Pulses and Selective Chemical Etching

Y. Lai, K. Zhou, M. Dubov, L. Zhang, and I. Bennion
OTuL4 Optical Fiber Communication Conference (OFC) 2006

Femtosecond laser-assisted etching of three dimensional woodpile micro-channel arrays in fused silica

Stephen Ho, Moez Haque, Peter Robert Herman, and James Stewart Aitchison
CTuAA1 CLEO: Science and Innovations (CLEO:S&I) 2011

3-D Fabrication of Microfluidic Channels in Fused Silica Using Focused Femtosecond Laser Beams and Selective Chemical Etching

Cyril Hnatovsky, Rod S. Taylor, Ravi Bhardwaj, Eli Simova, David M. Rayner, and Paul B. Corkum
CThCC2 Conference on Lasers and Electro-Optics (CLEO:S&I) 2005

View More...
Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use