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Conference Paper
Conference on Lasers and Electro-Optics
San Jose, California United States
May 4-9, 2008
ISBN: 978-1-55752-859-9
Photonic Integrated Circuits (CTuBB)

Demonstration of an Electronic Photonic Integrated Circuit in a Commercial Scaled Bulk CMOS Process

Jason S. Orcutt, Anatol Khilo, Milos A. Popovic, Charles W. Holzwarth, Benjamin Moss, Hanqing Li, Marcus S. Dahlem, Thomas D. Bonifield, Franz X. Kaertner, Erich P. Ippen, Judy L. Hoyt, Rajeev J. Ram, and Vladimir Stojanovic

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We demonstrate the first photonic chip designed in a commercial bulk CMOS process (65 nm node) using standard process layers combined with scalable post-processing, enabling dense photonic integration with high-performance microprocessor electronics.

© 2008 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.7370) Optical devices : Waveguides
(250.0250) Optoelectronics : Optoelectronics
(250.5300) Optoelectronics : Photonic integrated circuits

J. S. Orcutt, A. Khilo, M. A. Popovic, C. W. Holzwarth, B. Moss, H. Li, M. S. Dahlem, T. D. Bonifield, F. X. Kaertner, E. P. Ippen, J. L. Hoyt, R. J. Ram, and V. Stojanovic, "Demonstration of an Electronic Photonic Integrated Circuit in a Commercial Scaled Bulk CMOS Process," in Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies, OSA Technical Digest (CD) (Optical Society of America, 2008), paper CTuBB3.

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