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Conferences > CLEO > 2009 > CMCC > CMCC5
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CMCC5
  • •https://doi.org/10.1364/CLEO.2009.CMCC5

Microfabricated Out-of-plane Scanning Microlens for Raman Spectroscopy

Chin-Pang-Billy Siu, Haishan Zeng, and Mu Chiao

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Abstract

We present a microfabricated out-of-plane scanning microlens for miniaturized Raman Spectroscopy. The out-of-plane actuation is electrostatic driven and achieves 90 μm scan range at 1k Hz. A Raman spectrum analysis on drug, Tylenol, is reported.

© 2009 Optical Society of America

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