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Conferences > CLEO > 2009 > CTuAA > CTuAA1
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper CTuAA1
  • •https://doi.org/10.1364/CLEO.2009.CTuAA1

High-precision Contouring of Rapidly Oscillating Optical Surfaces with Two-wavelength Single-shot Digital Holography

Thomas Hansel, Günter Steinmeyer, Klaus Reimann, Ruediger Grunwald, and Uwe Griebner

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Abstract

A novel method for contouring of optical surfaces with unprecedented dynamic range is presented. At an object depth >50 µm, surface deformations of a MEMS of some 10 nm are still unambiguously detectable.

© 2009 Optical Society of America

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