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Optical Manipulation of Microbeads in an Integrated Optofluidic Device

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Abstract

We demonstrate optical manipulation of 1-μm-sized polystyrene beads in a silicon-based integrated optofluidic device. The relative velocity of the optically driven microbeads is ~14.2 μm/s and ~3.5 μm/s using 0.7-μm and 0.5-μm-thick silicon nitride waveguides.

© 2010 Optical Society of America

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