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Conference Paper
The European Conference on Lasers and Electro-Optics
Munich Germany
May 22-26, 2011
ISBN: 978-1-4577-0532-8
Nano-and Micro-Resonators (CE5)

Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever

Lasse J. Kauppinen, Shahina M.C. Abdulla, Gijs J.M. Krijnen, Markus Pollnau, and René M. de Ridder  »View Author Affiliations



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Abstract

Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring can be tuned over a 50 pm wavelength range by applying 8.5V, without affecting its Q-factor.

© 2011 IEEE

Citation
L. J. Kauppinen, S. M. C. Abdulla, G. J. M. Krijnen, M. Pollnau, and R. M. de Ridder, "Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever," in CLEO/Europe and EQEC 2011 Conference Digest, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CE5_1.
http://www.opticsinfobase.org/abstract.cfm?URI=CLEO_Europe-2011-CE5_1


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