Monolithic integration of a micromechanical cantilever with an optical ring resonator in silicon on insulator is demonstrated. The ring can be tuned over a 50 pm wavelength range by applying 8.5V, without affecting its Q-factor.
© 2011 IEEE
L. J. Kauppinen, S. M. C. Abdulla, G. J. M. Krijnen, M. Pollnau, and R. M. de Ridder, "Electromechano-optically tuned ring resonator in silicon on insulator, monolithically integrated with a microcantilever," in CLEO/Europe and EQEC 2011 Conference Digest, OSA Technical Digest (CD) (Optical Society of America, 2011), paper CE5_1.
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