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Conferences > CLEO_AT > 2011 > AMA > AMA3

Selective Tuning of Silicon Photonic Crystal Cavities via Laser-Assisted Local Oxidation

J. Zheng, C. J. Chen, J. F. McMillan, M. Yu, G.-Q Lo, D-L. Kwong, and C. W. Wong

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Abstract

Ultra-high-Q nanocavity resonance tuning by laser-assisted thermal oxidation of silicon is demonstrated by using a 532 nm continuous wave laser. The resonance is blue-shifted by >2nm. The quality factor remains >200,000.

© 2011 Optical Society of America

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