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Conferences > CLEO_AT > 2014 > AW3H > AW3H.5

Femtosecond pulses for 3-D surface measurement of microelectronic step-structures

Young-Jin Kim, Woo-Deok Joo, Jiyong Park, Seungman Kim, and Seung-Woo Kim

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Abstract

We present a fast and precise 3-D measurement of microelectronic step-structures over a wide field-of-view by utilizing high spatial coherence, low temporal coherence and repetition rate tunablility of femtosecond laser pulses.

© 2014 Optical Society of America

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