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TOF-Range Image Sensor in 0.18µm CMOS technology based on Current Assisted Photonic Demodulators

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Abstract

We report on a 0.18µm CMOS range image sensor with 120×160 array of 10×10µm2 photonic demodulation pixels allowing for real-time 3D imaging with a worst-case accuracy of 3.3% in the distance interval [1.2–3.7] m.

© 2011 Optical Society of America

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