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Self-aligned Silicon Fins in Metallic Slits as a Platform for Planar Tunable Nanoscale Resonant Photodetectors

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Abstract

We demonstrate self-aligned fabrication of etched silicon fins in metallic slits and show that this structure supports both dielectric and plasmonic resonances and photodetection that can be tuned by varying the width of the fin

© 2012 Optical Society of America

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