Abstract
We present a comparison of three different technologies for the fabrication of microoptical elements with arbitrary surfaces. We used direct laser writing, binary mask lithography in combination with reactive ion etching, and graytone lithography.
© 2000 Optical Society of America
PDF ArticleMore Like This
K.-H. Brenner, J. Bähr, and T. Schmelcher
DWA4 Diffractive Optics and Micro-Optics (DOMO) 2000
Margit Ferstl
DTuD.21 Diffractive Optics and Micro-Optics (DOMO) 1998
J. Cunha and Diogo E. Aguiam
127982Y International Optical Design Conference (IODC) 2023