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Optica Publishing Group
  • Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing
  • OSA Technical Digest (Optica Publishing Group, 2004),
  • paper XWA2
  • https://doi.org/10.1364/DOMO.2004.XWA2

Measurement advances for micro-refractive fabrication

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Abstract

Micro-refractive lenses are critical components in many devices, yet characterization remains challenging. We have developed calibration methods for micro-interferometry to improve form error, transmitted wavefront, and radius of curvature measurements.

© 2004 Optical Society of America

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