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Characterization and testing of a MEMS scanning grating for structured illumination in a miniature microscope

Jeremy D. Rogers, Tomasz Tkaczyk, Michael R. Descour, and Todd R. Christenson

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Abstract

The latest results from an effort to produce a miniature structured illumination module will be presented. The module is a LIGA fabricated MEMS device consisting of electrostatic actuators that drive a scanning grating mounted on springs. The device is designed to be driven at resonance and modulate the illumination of a miniature microscope for optical sectioning.

© 2003 Optical Society of America

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