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Conferences > FiO > 2005 > FWK > FWK4

Near-Field Solid Immersion Lens (SIL) Microscope

Tao Chen, David Felix, Sang-Ki Park, Brendan McCarthy, Dror Sarid, and Tom Milster

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Abstract

A near-field solid immersion lens (SIL) microscope is developed for a standard microscope. With white-light incoherent illumination, the resolution of this system for observing DVDs pits is around 200nm with an effective NA of 1.5.

© 2005 Optical Society of America

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