A very large fabrication tolerance for the high-index-contrast subwavelength grating (HCG) integrated VCSELs is experimentally demonstrated, with similar performance over as large as ±20% variation in the HCG critical dimension.
© 2007 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.2770) Diffraction and gratings : Gratings
(250.0250) Optoelectronics : Optoelectronics
(250.7260) Optoelectronics : Vertical cavity surface emitting lasers
Y. Zhou, M. C. Huang, J. Kern, and C. J. Chang-Hasnain, "Very Large Fabrication Tolerance of VCSELs Using High-Contrast Subwavelength Grating," in Frontiers in Optics 2007/Laser Science XXIII/Organic Materials and Devices for Displays and Energy Conversion, OSA Technical Digest (CD) (Optical Society of America, 2007), paper FMD4.
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