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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper FTuP4
  • https://doi.org/10.1364/FIO.2008.FTuP4

Fabrication of Three-Dimensional Photonic Crystals by Templated Atomic Layer Deposition

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Abstract

We report investigations of atomic layer deposition for 3D structure modification. Application to opal templates shows that dielectric inversion, large pore structures and conformal backfilling significantly enhance the photonic band gap and optical functionality.

© 2008 Optical Society of America

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