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Optica Publishing Group
  • Frontiers in Optics 2008/Laser Science XXIV/Plasmonics and Metamaterials/Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2008),
  • paper JSuA27
  • https://doi.org/10.1364/FIO.2008.JSuA27

SiO2/HfO2 multilayers: impact of process parameters and stack geometry on the optical and structural properties

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Abstract

Loss, stress and surface roughness in ion-beam deposition of HfO2/SiO2 interference coatings are assessed for different growth conditions to understand how to improve the performance of these coatings for high power laser applications.

© 2008 Optical Society of America

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