Author Affiliations

W. Freude,^1,2,* L. Alloatti,¹ D. Korn,¹ M. Lauermann,¹ A. Melikyan,¹ R. Palmer,¹ J. Pfeifle,¹ P. C. Schindler,¹ C. Weimann,¹ R. Dinu,⁴ J. Bolten,⁵ T. Wahlbrink,⁵ M. Waldow,⁵ S. Walheim,^6,7 P. M. Leufke,⁶ S. Ulrich,⁸ J. Ye,⁸ P. Vincze,⁶ H. Hahn,⁶ H. Yu,⁹ W. Bogaerts,⁹ V. Brasch,¹⁰ T. Herr,¹⁰ R. Holzwarth,^11,12 K. Hartinger,¹² C. Stamatiadis,¹³ M. F. O’Keefe,¹⁴ L. Stampoulidis,¹⁵ L. Zimmermann,¹⁶ R. Baets,⁹ Th. Schimmel,^6,7 I. Tomkos,¹⁷ K. Petermann,¹³ T. J. Kippenberg,¹⁰ C. Koos,^1,2 and J. Leuthold^1,2,3

¹Institute of Photonics and Quantum Electronics (IPQ-KIT), Karlsruhe Institute of Technology (KIT), 76131 Karlsruhe, Germany

²Institute of Microstructure Technology (IMT-KIT), Zürich, Switzerland

³Now with Swiss Federal Institute of Technology (ETH), Zürich, Switzerland

⁴GigOptix Inc., Switzerland and GigOptix Bothell, Washington, USA

⁵AMO, Aachen, Germany

⁶Institute of Nanotechnology (INT-KIT), Gent, Belgium

⁷Institute of Applied Physics (IAP-KIT), Gent, Belgium

⁸Institute of Applied Materials (IAM-AWP-KIT), Gent, Belgium

⁹Photon. Res. Group, Ghent Univ. – IMEC, Dpt. of Informat. Technol. (INTEC) & Center of Nano- and Biophoton. (NB-Photon.), Gent, Belgium

¹⁰Ecole Polytech. Federale de Lausanne (EPFL)

¹¹MPQ Garching, Germany

¹²Menlo Systems, Martingsried, Germany

¹³Joint Lab Silicon Photonics HFT4, Technische Universität Berlin, Germany

¹⁴u2t Photonics, Sedgefield, UK

¹⁵Constelex Technology Enablers, Corallia Microelectronics Innovation Center, Athens, Greece

¹⁶IHP Frankfurt (Oder), Germany

¹⁷Athens Information Technology Center, Athens, Greece

^*Corresponding author: w.freude@kit.edu