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Conferences > IPR > 2003 > ITuH > ITuH7

Three-dimensionally profiled optical couplers fabricated by grayscale lithography

Thomas Dillon, Anita Balcha, Janusz Murakowski, and Dennis W. Prather

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Abstract

We have developed writing techniques for grayscale masks that we utilize in the fabrication of tapered coupling devices. These devices provide efficient coupling into optical circuits as compared to presently employed methods. We discuss mask process development, fabrication techniques, and device performance.

© 2003 Optical Society of America

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