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Conferences > IPRSN > 2012 > IW2C > IW2C.5

Wide Stiffness Range Cavity Optomechanical Sensors for Atomic Force Microscopy

Yuxiang Liu, Houxun Miao, Vladimir Aksyuk, and Kartik Srinivasan

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Abstract

We present chip-based sensors that integrate nanomechanical cantilevers with near-field optical readout for atomic force microscopy. Cantilever stiffness is varied over four orders of magnitude while maintaining fm/Hz1/2 displacement sensitivity, indicating potential in wide-ranging applications.

© 2012 Optical Society of America

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