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Conferences > IPRSN > 2013 > IT5A > IT5A.6

Linear Photonic Crystal Microcavities in Zero-Change SOI CMOS

Christopher V. Poulton, Xiaoge Zeng, Jason S. Orcutt, Jeffrey M. Shainline, Mark T. Wade, and Miloš A. Popović

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Abstract

Linear photonic crystal microcavities are demonstrated in 45 nm SOI CMOS with no process changes in foundry. Side-coupled waveguide excitation decouples cavity and coupling design. A loss Q on the order of 100,000 is demonstrated.

© 2013 Optical Society of America

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