This work presents the fabrication of 8X8 PDMS Fresnel microlens array (MLA) by maskless lithographic system. The FWHM intensity values of each spot present a deviation of 8%. Such a MLA can be applied as Shack-Hartmann wavefront sensor and to enhance the efficiency of detector arrays.
© 2012 OSA
G. A. Cirino, S. A. Lopera, A. N. Montagnoli, L. G. Neto, and R. D. Mansano, "Low-cost polymer Fresnel Microlens Array Fabricated by Maskless Lithography," in Latin America Optics and Photonics Conference, OSA Technical Digest (online) (Optical Society of America, 2012), paper LS4C.4.
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