Optical MEMS technology for high-density optical storage

K. Hane; M. Sasaki; Y. Kanamori

doi:10.1364/ODS.2003.WA1

Optical Data Storage
OSA Technical Digest Series (Optica Publishing Group, 2003),
paper WA1
•https://doi.org/10.1364/ODS.2003.WA1

Optical MEMS technology for high-density optical storage

K. Hane, M. Sasaki, and Y. Kanamori

Optical Data Storage 2003

Vancouver Canada
11–14 May 2003
ISBN: 1-55752-732-6

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K. Hane, M. Sasaki, and Y. Kanamori, "Optical MEMS technology for high-density optical storage," in Optical Data Storage, OSA Technical Digest Series (Optica Publishing Group, 2003), paper WA1.

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Abstract

An optical data storage system based on the near-field technology is proposed. Microfabrication technique for the three-dimensional structure has been developed. An integrated nearfield optical probe and some MEMS components have been fabricated.

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