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Characterization of thermally poled germanosilicate thin films

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Abstract

We report measurements of the nonlinearity profile of thermally poled low-loss germanosilicate films deposited on fused-silica substrates by PECVD, of interest as potential electro-optic devices. The profiles of films grown and poled under various conditions all exhibit a sharp peak ~0.5 μm beneath the anode surface, followed by a weaker pedestal of approximately constant amplitude down to a depth of 13–16 μm, without the sign reversal typical of poled undoped fused silica. These features suggest that during poling, the films significantly slow down the injection of positive ions into the structure. After local optimization, we demonstrate a record peak nonlinear coefficient of ~1.6 pm/V, approximately twice as strong as the highest reliable value reported in thermally poled fused silica glass, a significant improvement that was qualitatively expected from the presence of Ge.

©2004 Optical Society of America

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Figures (5)

Fig. 1.
Fig. 1. Calibrated MF curves measured for (a) sample # 2, (b) sample # 3, and (c) sample # 4. The solid curves are the theoretical MF curves computed from the recovered d 33(z) profiles. (d) The recovered optical nonlinearity depth profiles of sample # 2 (blue), # 3 (red) and # 4 (black).
Fig. 2.
Fig. 2. Blue curve (left axis): the ratio of the χ (3) of the PECVD grown layer to the χ (3) of fused silica; green curve (right axis): maximum built-in E-field measured in poled germanosilicate films.
Fig. 3.
Fig. 3. Charge density of poled sample # 4, inferred by differentiating the recovered d 33(z) profile.
Fig. 4.
Fig. 4. Calibrated MF curves measured for (a) sample #1, (b) sample #6, and (c) sample #7. The solid curves in each figure are the theoretical MF curves computed from the recovered d 33(z) profiles. (d) The recovered nonlinearity profiles of sample #1 (blue), #3 (red), #6 (black) and #7 (green).
Fig. 5.
Fig. 5. Calibrated MF curve measured for (a) sample #5. The solid curves are the theoretical MF curves computed from the recovered d 33(z) profiles. (b) The recovered optical nonlinearity depth profile of samples #3 (red) and #5 (blue).

Tables (1)

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Table 1. Characteristics and poling time of germanosilicate films poled in air at ~5 kV and ~280 °C.

Equations (1)

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d 33 = 3 2 χ ( 3 ) E
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