Abstract

We describe how spectrally-resolved white-light phase-shifting interference microscopy with a windowed 8-step algorithm can be used for rapid and accurate measurements of the thickness profile of transparent thin film layers with a wide range of thicknesses deposited upon patterned structures exhibiting steps and discontinuities. An advantage of this technique is that it can be implemented with readily available hardware.

©2006 Optical Society of America

Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate

Sanjit K. Debnath, Seung-Woo Kim, Mahendra P. Kothiyal, and Parameswaran Hariharan
Appl. Opt. 49(34) 6624-6629 (2010)

Spectrally resolved phase-shifting interferometry of transparent thin films: sensitivity of thickness measurements

Sanjit K. Debnath, Mahendra P. Kothiyal, Joanna Schmit, and Parameswaran Hariharan
Appl. Opt. 45(34) 8636-8640 (2006)

Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

Young-Sik Ghim and Seung-Woo Kim
Opt. Express 14(24) 11885-11891 (2006)

Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry

Seung-Woo Kim and Gee-Hong Kim
Appl. Opt. 38(28) 5968-5973 (1999)

Improved optical profiling using the spectral phase in spectrally resolved white-light interferometry

Sanjit Kumar Debnath and Mahendra Prasad Kothiyal
Appl. Opt. 45(27) 6965-6972 (2006)