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Conference Paper
Optical Fiber Communication Conference
San Diego, California United States
March 22-26, 2009
ISBN: 978-1-55752-865-0
Si Photonic Devices (OMR)

CMOS-Integrated 40GHz Germanium Waveguide Photodetector for On-Chip Optical Interconnects

Solomon Assefa, Fengnian Xia, Stephen W. Bedell, Ying Zhang, Teya Topuria, Philip M. Rice, and Yurii A. Vlasov


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Compact (0.7µmx20µm) germanium waveguide photodetector operating at 40Gbps is demonstrated. Monolithic integration of high-quality Ge-on-insulator single-crystalline layer into CMOS stack was achieved by lateral seeded crystallization during CMOS wells activation anneal above germanium melting temperature.

© 2009 Optical Society of America

OCIS Codes
(040.0040) Detectors : Detectors
(040.5160) Detectors : Photodetectors
(200.0200) Optics in computing : Optics in computing
(200.4650) Optics in computing : Optical interconnects

S. Assefa, F. Xia, S. W. Bedell, Y. Zhang, T. Topuria, P. M. Rice, and Y. A. Vlasov, "CMOS-Integrated 40GHz Germanium Waveguide Photodetector for On-Chip Optical Interconnects," in Optical Fiber Communication Conference and National Fiber Optic Engineers Conference, OSA Technical Digest (CD) (Optical Society of America, 2009), paper OMR4.

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