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Rapid Prototyping of Polymer Micro-Opto-Mechanical Components with Deep Proton Writing

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Abstract

We present Deep Proton Writing as a flexible rapid prototyping technology for the fabrication of a wide variety of three dimensional refractive micro-optical components and high aspect ratio micro-mechanical structures with applications in telecom, datacom and biophotonics.

© 2006 Optical Society of America

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