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Conferences > OFT > 2010 > OTuA > OTuA5
  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OTuA5
  • •https://doi.org/10.1364/OFT.2010.OTuA5

Roughness Measurement of Ultra Precision Surfaces using Light Scattering Techniques and Analysis

Tobias Herffurth, Sven Schröder, Marcus Trost, and Angela Duparré

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Abstract

Light scattering techniques are used as powerful method for roughness measurements. Recent achievements in characterizing even large and curved surfaces are presented.

© 2010 OSA, SPIE

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