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  • International Optical Design Conference and Optical Fabrication and Testing
  • OSA Technical Digest (CD) (Optica Publishing Group, 2010),
  • paper OWE2
  • https://doi.org/10.1364/OFT.2010.OWE2

VIBE™ finishing to remove mid-spatial frequency ripple

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Abstract

The VIBE™ process is a full-aperture, conformal polishing process incorporating high frequency and random motion designed to rapidly remove sub-surface damage in a VIBE pre-polish step and eliminate mid-spatial frequency (MSF) errors in a VIBE finishing step.

© 2010 OSA, SPIE

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