Light scattering measurements are used to determine surface PSD functions and application-specific roughness values in different relevant spatial frequency ranges. A new method is presented for area covering investigations of the high-spatial frequency roughness.
© 2012 OSA
S. Schröder, M. Trost, L. Coriand, and A. Duparré, "Light scattering-based measurement of relevant surface roughness," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper OTu1D.2.
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