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Interferometric Measurements of Aspheric Surfaces with No Axial Symmetry

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Abstract

Interferometric methods in optical testing are limited in practice to measurements of flat and spherical surfaces. With introduction of mass-produced aspheric lenses there is growing need for robust metrology solutions to problems of testing various types of aspheric surfaces. Proposed methods are either cumbersome and expensive (CGHs) or are restricted to certain types of parts only, like axially symmetric surfaces. We would like to present an approach based on a Computer Generated Reference (CGR) to test a variety of aspheric surfaces including standard axially symmetric parts as well as toric, bi-conic and "free forms".

© 2012 Optical Society of America

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