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Optics InfoBase > Conference Papers > OFT > 2012 > OTu2D > Page OTu2D.5 © 2012 OSA

Conference Paper
Optical Fabrication and Testing
Monterey, California United States
June 24-28, 2012
ISBN: 1-55752-947-7
Optical Testing II (OTu2D)

Objective Measurement of Scratch and Dig

Dave Aikens  »View Author Affiliations


http://dx.doi.org/10.1364/OFT.2012.OTu2D.5


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Abstract

Description of the meaning of scratch and dig specifications, and the methods available for validating optical components to a surface quality level. Particular attention is paid to objective measurement methods currently available, such as scatterometry.

© 2012 OSA

OCIS Codes
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(220.4840) Optical design and fabrication : Testing

Citation
D. Aikens, "Objective Measurement of Scratch and Dig," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper OTu2D.5.
http://www.opticsinfobase.org/abstract.cfm?URI=OFT-2012-OTu2D.5


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