Description of the meaning of scratch and dig specifications, and the methods available for validating optical components to a surface quality level. Particular attention is paid to objective measurement methods currently available, such as scatterometry.
© 2012 OSA
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(220.4840) Optical design and fabrication : Testing
D. Aikens, "Objective Measurement of Scratch and Dig," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper OTu2D.5.
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