The Tutorial will highlight recent advances achieved in R&D of Ion beam figuring (IBF), ion Beam Smoothing (IBS), Reactive Ion Beam Etching (RIBE) and atmospheric Plasma Jet Machining (PJM) (deep aspherization, nanometer shape correction, smoothing, film deposition) at IOM Leipzig.
© 2012 OSA
(220.1250) Optical design and fabrication : Aspherics
(220.4610) Optical design and fabrication : Optical fabrication
(220.5450) Optical design and fabrication : Polishing
(350.3850) Other areas of optics : Materials processing
A. Schindler, "Tutorial on Recent Advances in Ion Beam and Plasma Jet Processing," in Imaging and Applied Optics Technical Papers, OSA Technical Digest (online) (Optical Society of America, 2012), paper OW4D.1.
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