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Fabrication of Silicon Carbide Optics by Electrical Discharge Machining: Removal Characteristics of Silicon Carbide with Low Electrical Resistance

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Abstract

We discuss the application of electrical discharge machining in the forming step in the fabrication of SiC optics. Chemical vapor deposition SiC and sintered SiC plates were machined to investigate their removal characteristics.

© 2014 Optical Society of America

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