Dual Magnetron sputtering is applied for deposition of optical multilayers in a vertical in-line coater. The reactive sputter process for SiO2, TiO2 and Nb2O5 films is controlled by PEM. Single and multiple pass mode are considered with regard to the productivity.
© 2001 Optical Society of America
J. Struempfel, G. Teschner, and C. May, " Dual magneton sputtering for optical coatings," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper MB1.
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