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Conference Paper
Optical Interference Coatings
Banff Canada
July 15, 2001
ISBN: 1-55752-682-6
Deposition of Optical Coatings II (MB)

Dual magneton sputtering for optical coatings

Johannes Struempfel, G. Teschner, and C. May

http://dx.doi.org/10.1364/OIC.2001.MB1


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Abstract

Dual Magnetron sputtering is applied for deposition of optical multilayers in a vertical in-line coater. The reactive sputter process for SiO2, TiO2 and Nb2O5 films is controlled by PEM. Single and multiple pass mode are considered with regard to the productivity.

© 2001 Optical Society of America

OCIS Codes
(230.4170) Optical devices : Multilayers
(310.1860) Thin films : Deposition and fabrication

Citation
J. Struempfel, G. Teschner, and C. May, " Dual magneton sputtering for optical coatings," in Optical Interference Coatings, OSA Technical Digest Series (Optical Society of America, 2001), paper MB1.
http://www.opticsinfobase.org/abstract.cfm?URI=OIC-2001-MB1


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