Internal stress properties of fluoride thin films for VUV applications

E. Fukumoto; T. Aoki; S. Ogura

doi:10.1364/OIC.2001.TuF9

Optical Interference Coatings
OSA Technical Digest Series (Optica Publishing Group, 2001),
paper TuF9
•https://doi.org/10.1364/OIC.2001.TuF9

Internal stress properties of fluoride thin films for VUV applications

E. Fukumoto, T. Aoki, and S. Ogura

Optical Interference Coatings 2001

Banff Canada
ISBN: 1-55752-682-6

From the session
Materials and Properties of Optical Coatings (TuF)

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
E. Fukumoto, T. Aoki, and S. Ogura, "Internal stress properties of fluoride thin films for VUV applications," in Optical Interference Coatings, OSA Technical Digest Series (Optica Publishing Group, 2001), paper TuF9.

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Abstract

We deposited MgF₂ and LaF₃ films on quartz glass plates as anti-reflective coatings for VUV region, and report here their internal stress behavior, adopting in-situ stress measurement.

PDF Article

More Like This

Stress Compensation in Fluoride Coatings for the VUV Spectral Range

Stefan Günster, Manfred Dieckmann, Henrik Ehlers, and Detlev Ristau
TuB5 Optical Interference Coatings (OIC) 2007

Stress, microstructure and thermal-elastic properties of evaporated thin MgF2 – films

R. Thielsch, J. Heber, T. Feigl, and N. Kaiser
ThE6 Optical Interference Coatings (OIC) 2004

Optical and structural properties of coatings for the UV/VUV-spectral range

Stefan Günster, Detlev Ristau, Salvador Bosch, Angela Duparré, Enrico Masetti, George Kiriakidis, Francesca Peiró, Etienne Quesnel, and Alexander Tikhonravov
ThB1 Optical Interference Coatings (OIC) 2001

Previous Article Next Article