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Conferences > OIC > 2004 > MF > MF4

Growth study of ultra-porous silicon for photonic interference filters

Kate Kaminska, Aram Amassian, Ludvik Martinu, and Kevin Robbie

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Abstract

We study the growth of glancing angle deposited films using in situ spectroscopic ellipsometry for the first time. Our results should improve our future ability to control the fabrication of photonic interference filters.

© 2004 Optical Society of America

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