Design of Aperiodic Multilayers for EUV Applications

A. Tikhonravov; M. Trubetskov; M. Trubetskov; S. Sharapova; Z. Wang; Z. Wang

doi:10.1364/OIC.2013.TB.8

Optical Interference Coatings
OSA Technical Digest (online) (Optica Publishing Group, 2013),
paper TB.8
•https://doi.org/10.1364/OIC.2013.TB.8

Design of Aperiodic Multilayers for EUV Applications

A. Tikhonravov, M. Trubetskov, S. Sharapova, and Z. Wang

Optical Interference Coatings 2013

Whistler Canada
16–21 June 2013
ISBN: 978-1-55752-970-1

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Design I (TB)

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A. Tikhonravov, M. Trubetskov, S. Sharapova, and Z. Wang, "Design of Aperiodic Multilayers for EUV Applications," in Optical Interference Coatings, M. Tilsch and D. Ristau, eds., OSA Technical Digest (online) (Optica Publishing Group, 2013), paper TB.8.

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Abstract

We show that design techniques elaborated for conventional optical coating allow one to design EUV coatings with superior properties. High potential of designs composed of more than two materials is demonstrated.

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