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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2006),
  • paper PTuB2
  • https://doi.org/10.1364/PHAST.2006.PTuB2

Methods and Tools for Semiconductor Annealing and Silicon Thin Film Crystallization using Solid State Lasers

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Abstract

For future 65 nm and smaller nodes, thermal anneal processes in the ms and µs range are required. Based on laboratory tests using the line scan method, an R&D system has been developed

© 2006 Optical Society of America

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